Soft lithography facilitates the fabrication of intricate three-dimensional patterns and structures at both microscale and nanoscale dimensions. Diverging from photolithography, a technique commonly ...

The method of fabricating structures and devices at the nanoscale, known as nanofabrication, has resulted in major developments in several fields, such as electronics, medicine, and materials science.

Researchers, equipment vendors, and manufacturers alike are watching with growing concern as we creep every closer to the end of 193 nm optical lithography. The problem is not that there are no ...